发明名称 DEVICE AND METHOD FOR PLASMA TREATMENT OF SURFACES
摘要 A method and a device for the plasma treatment of surfaces of at least one workpiece. At least one plasma source is connected to an energy source in order to generate a plasma. A closed area is in fluid connection to the at least one plasma source. At least one suction unit is used to adjust a pressure difference between the at least one plasma source and the closed area.
申请公布号 EP2805345(A1) 申请公布日期 2014.11.26
申请号 EP20130700638 申请日期 2013.01.09
申请人 MASCHINENFABRIK REINHAUSEN GMBH 发明人 NETTESHEIM, STEFAN;FORSTER, KLAUS;KORZEC, DARIUSZ
分类号 H01J37/32;H05H1/44 主分类号 H01J37/32
代理机构 代理人
主权项
地址