发明名称 SYSTEMS AND METHODS FOR RAPID LIQUID PHASE DEPOSITION OF FILMS
摘要 <p>A rapid liquid phase deposition (LPD) process of coating a substrate provides improved deposition rates. The LPD process may include the following steps: incubation of acids with corresponding oxides, sulfide, or selenide for a predetermined period of time; removing the undissolved oxides, sulfide, or selenide; liquid phase deposition of the oxide, sulfide, or selenide film or coating at an elevated temperature; and removing the substrate from the growth solution. Further, the growth solution can be prepared for re-use by cooling to a desired temperature and adding extra oxides, sulfides, or selenides.</p>
申请公布号 EP2676290(A4) 申请公布日期 2014.11.26
申请号 EP20120746501 申请日期 2012.02.14
申请人 NATCORE TECHNOLOGY, INC. 发明人 KUZNETSOV, OLEG A.;ZHANG, YUANCHANG
分类号 H01L21/31 主分类号 H01L21/31
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