发明名称 METHOD FOR CALIBRATING A ROBOT MOUNTED ON ACTIVE MAGNETIC BEARINGS
摘要 <p>Method for calibrating a robot mounted on active magnetic bearings and having a gripper vertically positionable along a z axis and which is displaceable in a first magnetic bearing along an x axis and in a second magnetic bearing along a y axis includes dividing the first and second magnetic bearings into four mounting points; defining the setpoint center coordinates for the X, Y, Z axes and also the setpoint values for the angular positions delta, epsilon and transformation of the setpoint values into setpoint values for the vertical setpoint positions of the mounting points; specifying the actuating forces for the electromagnets of the mounting points; determining the current vertical positions for the mounting points; measuring the current vertical position of the mounting points and conversion into actual center coordinates; comparing the actual center coordinates with the setpoint center coordinates, determining the deviation and repeating the preceding steps.</p>
申请公布号 EP2636057(B1) 申请公布日期 2014.11.26
申请号 EP20120731351 申请日期 2012.06.19
申请人 SEMILEV GMBH 发明人 OLDENDORF, ULRICH
分类号 H01L21/677 主分类号 H01L21/677
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