发明名称 感放射線性組成物
摘要 <p>A radiation-sensitive composition includes a polymer composition and a radiation-sensitive acid generator. The polymer composition includes a first polymer and a second polymer. The first polymer includes a repeating unit shown by a following formula (1). The second polymer includes a repeating unit shown by a following formula (2) and does not include a repeating unit shown by the formula (1).</p>
申请公布号 JP5630444(B2) 申请公布日期 2014.11.26
申请号 JP20110547482 申请日期 2010.12.14
申请人 发明人
分类号 G03F7/039;C08F220/10;G03F7/004;H01L21/027 主分类号 G03F7/039
代理机构 代理人
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