发明名称 形状測定装置、形状測定方法及び形状測定プログラム
摘要 This profile-measuring device causes a contact to follow a surface of an object-to-be-measured and measures a profile of the surface. A pseudo-measurement point acquiring section acquires, as pseudo-measurement points, positional coordinates of a basing point of the contact when said contact contacts with said object-to-be-measured at plural places. In addition, a contact-model allocating section allocates a contact model by matching the basing point to the pseudo-measurement point, and matching an orientation of the contact and the contact model at a time of measuring, the contact model specifying a surface profile of the contact and having a predetermined definition range. A measurement-point acquiring section acquires, as measurement points, positions of the surface of the object-to-be-measured based on the contact model and the pseudo-measurement points. A measurement-point deleting section deletes a measurement point obtained by the measurement-point acquiring section based on a relationship between the definition range and the measurement points.
申请公布号 JP5629883(B2) 申请公布日期 2014.11.26
申请号 JP20080141570 申请日期 2008.05.29
申请人 发明人
分类号 G01B5/20 主分类号 G01B5/20
代理机构 代理人
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