Drive end-block for a rotatable magnetron

摘要

A drive end block for a rotatable magnetron comprises a housing, which has a vacuum-tight rotary feedthrough extending through a wall of the housing, and a drive apparatus for generating a torque. An output end of the rotary feedthrough lies outside the housing for connection to the rotatable magnetron and a drive end of the rotary feedthrough lies inside the housing for introducing a torque. The drive apparatus is situated outside the housing of the drive end block and is connected using a torque transmission apparatus to the drive end of the rotary feedthrough so that the drive apparatus is electrically insulated from the housing and the rotary feedthrough of the drive end block.

主权项

1. A drive end block for a rotatable magnetron, comprising a housing located in an interior of a vacuum chamber and attached to a supporting wall of the vacuum chamber, the housing having a vacuum-tight rotary feedthrough extending through a wall of the housing, said housing wall being perpendicular to the supporting wall of the vacuum chamber, and a drive apparatus for generating a torque, an output end of the rotary feedthrough lying outside the housing and inside the vacuum chamber for connection to the rotatable magnetron and a drive end of the rotary feedthrough lying inside the housing for introducing a torque, wherein the drive apparatus is situated outside the housing of the drive end block and is connected to the drive end of the rotary feedthrough through an opening in the supporting wall of the vacuum chamber using a torque transmission apparatus, the drive apparatus is electrically insulated from the housing and from the rotary feedthrough of the drive end block, and wherein, in an interior of the housing, a drive wheel of the rotary feedthrough is mounted to rotate on, about, and relative to a central immobile axle stub and electrically insulated independently of the rotary feedthrough and the housing.