发明名称 |
Piezoelectric film and method for manufacturing the same, piezoelectric film element and method for manufacturing the same, and piezoelectric film device |
摘要 |
There is provided a piezoelectric film having an alkali niobate-based perovskite structure expressed by a general formula (NaxKyLiz)NbO3(0≦x≦1, 0≦y≦1, 0≦z≦0.2, x+y+z=1), wherein the alkali niobate has a crystal structure of a pseudo-cubic crystal, a tetragonal crystal, an orthorhombic crystal, a monoclinic crystal, a rhombohedral crystal, or has a crystal structure of coexistence of them, and when total of K—O bonding and K-Metal bonding is set as 100% in a binding state around K-atom of the alkali niobate, a K—O bonding ratio is 46.5% or more and a K-Metal bonding ratio is 53.5% or less, wherein the Metal indicates a metal atom included in the piezoelectric film. |
申请公布号 |
US8896187(B2) |
申请公布日期 |
2014.11.25 |
申请号 |
US201213532081 |
申请日期 |
2012.06.25 |
申请人 |
Hitachi Metals, Ltd. |
发明人 |
Suenaga Kazufumi;Shibata Kenji;Watanabe Kazutoshi;Nomoto Akira;Horikiri Fumimasa |
分类号 |
H01L41/083;H01L41/08;H01L41/187;H01L41/316 |
主分类号 |
H01L41/083 |
代理机构 |
Fleit Gibbons Gutman Bongini & Bianco PL |
代理人 |
Fleit Martin;Bianco Paul D.;Fleit Gibbons Gutman Bongini & Bianco PL |
主权项 |
1. A piezoelectric film having an alkali niobate-based perovskite structure expressed by a general formula (NaxKyLiz)NbO3(0≦x≦1, 0≦y≦1, 0≦z≦0.2, x+y+z=1), wherein the alkali niobate has a crystal structure of a pseudo-cubic crystal, a tetragonal crystal, an orthorhombic crystal, a monoclinic crystal, a rhombohedral crystal, or has a crystal structure of coexistence of them, and when total of K—O bonding and K-Metal bonding is set as 100% in a binding state around K-atom of the alkali niobate, a K—O bonding ratio is 46.5% or more and a K-Metal bonding ratio is 53.5% or less, wherein the Metal indicates a metal atom included in the piezoelectric film. |
地址 |
Tokyo JP |