Micromechanical component and a method for operating a micromechanical component

摘要

A micromechanical component has a light window; a mirror element adjustable with respect to the light window from a first position into at least one second position about at least one axis of rotation, an optical sensor having a detection surface designed to ascertain a light intensity on the detection surface and to provide a corresponding sensor signal. The light window, the mirror element in the first position and the detection surface are situated in relation to one another in such a way that a portion of a light beam reflected on the light window strikes the detection surface at least partially; and an evaluation unit designed to define, on the basis of the sensor signal, information regarding an instantaneous position of the mirror element and/or an instantaneous intensity of the deflected light beam.

主权项

1. A micromechanical component, comprising:
a light window; a mirror element configured to be adjustable with respect to the light window from a first position about at least one axis of rotation into at least one second position; an optical sensor having a detection surface and configured to (i) ascertain at least one of a light intensity and an incident position of an incident light beam on the detection surface and (ii) supply a sensor signal corresponding to the at least one of the light intensity and the incident position of the incident light beam, wherein the light window, the mirror element in the first position and the detection surface are situated with respect to one another in such a way that a light beam is deflected onto the light window by the mirror element, and a portion of the light beam deflected onto the light window is reflected by the light window and at least partially strikes the detection surface; an evaluation device configured to define information about at least one of an instantaneous position of the mirror element with respect to the light window and an instantaneous intensity of the deflected light beam, taking into account the sensor signal supplied by the optical sensor; and a control unit configured to (i) adjust the mirror element about two axes of rotation for scanning a projection area with the aid of a portion of the light beam deflected onto the light window and transmitted through the light window, and (ii) upon receiving a supplied light beam blocking signal, adjust the mirror element in such a way that the deflected light beam is directed onto an aperture of the micromechanical component; wherein the aperture is mounted on the light window.