PROBE CARD INSPECT APPARATUS

摘要

A probe card inspection apparatus is disclosed. The probe card inspection apparatus according to the present invention comprises: a base mounted on a worktable; a jig mounting unit formed on an upper side of the base and including a jig in which the probe card is mounted; a horizontal position control unit to control a position by moving the jig mounting unit to an x-shaft and a y-shaft; an input terminal mounting unit in which a mounting stand formed at an upper and other side of the base is mounted and in which an input terminal connected to a contact point of the probe card is formed; an elevating control unit to control an input terminal to connect to a contact point of the probe card or to be separated from the contact point of the probe card by elevating the input terminal mounting unit; a rotation unit to rotate the jig with a predetermined angle by being formed on the jig mounting unit; and a control unit to display the contact point by receiving a signal of the input terminal and to notify a checking result by checking faults by comparing the signal with channel map data. Therefore, a process is simplified because inspection for the probe card can be executed by one staff. The database of a product is available. Fraction defective is reduced. Convenience is increased.