| 发明名称 | Imprint apparatus and article manufacturing method | ||
| 摘要 | The imprint apparatus of the present invention includes a holding unit configured to hold a mold; a particle inspection unit configured to inspect whether or not particle is present on an imprint area, in which the resin pattern is formed, of the substrate; a dispenser configured to apply an uncured resin to the imprint area; a movable unit configured to move the imprint area with respect to the holding unit; and a controller. The movable unit is capable of moving the imprint area to each of an inspection position by means of the inspection unit, an application position by means of the dispenser, and a contacting position by means of the holding unit. Also, the controller causes the inspection unit to perform inspection of the imprint area in association with the movement of the imprint area by means of the movable unit. | ||
| 申请公布号 | US8893649(B2) | 申请公布日期 | 2014.11.25 |
| 申请号 | US201113305990 | 申请日期 | 2011.11.29 |
| 申请人 | Canon Kabushiki Kaisha | 发明人 | Sato Hiroshi |
| 分类号 | B05C9/10;B05C11/00;B82Y40/00;B82Y10/00;B05C11/10;G03F7/00 | 主分类号 | B05C9/10 |
| 代理机构 | Rossi, Kimms & McDowell LLP | 代理人 | Rossi, Kimms & McDowell LLP |
| 主权项 | 1. An imprint apparatus that forms a pattern by bringing an uncured resin applied to a substrate into contact with a pattern surface of a mold, the imprint apparatus comprising: a holding unit configured to hold the mold; a particle inspection unit configured to inspect whether or not particle is present on an imprint area, in which the resin pattern is formed, of the substrate; a dispenser configured to apply the uncured resin to the imprint area; a movable unit configured to move the imprint area with respect to the holding unit; and a controller configured to control the operation of the holding unit, the particle inspection unit, the dispenser, and the movable unit, wherein the particle inspection unit is disposed on an axis, on which the holding unit and the dispenser is disposed, and wherein the movable unit is configured to move the imprint area to each of an inspection position by means of the particle inspection unit, an application position by means of the dispenser, and a contacting position by means of the holding unit, and the controller causes the particle inspection unit to perform inspection of the imprint area prior to the application of the uncured resin by means of the dispenser and during movement of the imprint area in association with the movement of the imprint area by means of the movable unit. | ||
| 地址 | JP | ||