发明名称 Semiconductor devices having gates including oxidized nickel
摘要 Schottky barrier semiconductor devices are provided including a wide bandgap semiconductor layer and a gate on the wide bandgap semiconductor layer. The gate includes a metal layer on the wide bandgap semiconductor layer including a nickel oxide (NiO) layer. Related methods of fabricating devices are also provided herein.
申请公布号 US8896122(B2) 申请公布日期 2014.11.25
申请号 US201012778334 申请日期 2010.05.12
申请人 Cree, Inc. 发明人 Mieczkowski Van;Hagleitner Helmut;Haberern Kevin
分类号 H01L21/335;H01L29/778;H01L29/24;H01L29/80;H01L29/66;H01L29/47;H01L29/812;H01L29/872;H01L29/16;H01L29/20 主分类号 H01L21/335
代理机构 Myers Bigel Sibley & Sajovec 代理人 Myers Bigel Sibley & Sajovec
主权项 1. A Schottky barrier semiconductor device comprising: a wide bandgap semiconductor layer; a gate on the wide bandgap semiconductor layer, the gate comprising a metal layer directly on the wide bandgap semiconductor layer, the metal layer including a nickel oxide (NiO) layer; and a layer of Nickel between the wide bandgap semiconductor layer and the NiO layer such that the wide bandgap layer does not contact the NiO layer.
地址 Durham NC US