发明名称 |
Semiconductor devices having gates including oxidized nickel |
摘要 |
Schottky barrier semiconductor devices are provided including a wide bandgap semiconductor layer and a gate on the wide bandgap semiconductor layer. The gate includes a metal layer on the wide bandgap semiconductor layer including a nickel oxide (NiO) layer. Related methods of fabricating devices are also provided herein. |
申请公布号 |
US8896122(B2) |
申请公布日期 |
2014.11.25 |
申请号 |
US201012778334 |
申请日期 |
2010.05.12 |
申请人 |
Cree, Inc. |
发明人 |
Mieczkowski Van;Hagleitner Helmut;Haberern Kevin |
分类号 |
H01L21/335;H01L29/778;H01L29/24;H01L29/80;H01L29/66;H01L29/47;H01L29/812;H01L29/872;H01L29/16;H01L29/20 |
主分类号 |
H01L21/335 |
代理机构 |
Myers Bigel Sibley & Sajovec |
代理人 |
Myers Bigel Sibley & Sajovec |
主权项 |
1. A Schottky barrier semiconductor device comprising: a wide bandgap semiconductor layer; a gate on the wide bandgap semiconductor layer, the gate comprising a metal layer directly on the wide bandgap semiconductor layer, the metal layer including a nickel oxide (NiO) layer; and a layer of Nickel between the wide bandgap semiconductor layer and the NiO layer such that the wide bandgap layer does not contact the NiO layer. |
地址 |
Durham NC US |