发明名称 Thin film deposition apparatus
摘要 <p>The present invention relates to a thin film depositing apparatus. The thin film depositing apparatus according to the present invention includes a chamber which includes a preset space to receive a substrate inside, and a gas supply unit which successively deposits a plurality of different deposition films on the substrate and relatively moves against the substrate.</p>
申请公布号 KR101464939(B1) 申请公布日期 2014.11.25
申请号 KR20130018504 申请日期 2013.02.21
申请人 发明人
分类号 H01L51/50;H01L51/56 主分类号 H01L51/50
代理机构 代理人
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