Method and device scanning a two-dimensional brush through an acousto-optic deflector (AOD) having an extended field in a scanning direction

摘要

The technology disclosed relates to improved acousto-optic deflectors (AODs). In particular, it relates to compensation for subtle effects not previously addressed by AOD designers. A shifting center of gravity is described and addressed using advanced power equalisation strategies. Denser writing brushes are provided by using a two-dimensional array of beams with corrections for factors such as angle of incidence at the AOD interface. The compensation and dense brush features can be used separately or in combination.

主权项

1. A method of using an acousto-optic deflector (AOD), including:
applying a variable frequency RF driving power to a transducer coupled to the AOD, wherein the RF driving power decreases as the variable frequency increases; and compensating for lesser diffraction efficiency at higher RF driving frequencies by varying base power of one or more flying spots deflected by the AOD onto a workpiece, wherein the base power increases as the variable frequency increases.