Plasmonic reflective display fabricated using anodized aluminum oxide

摘要

A method is provided for forming a reflective plasmonic display. The method provides a substrate and deposits a bottom dielectric layer. A conductive film is deposited overlying the bottom dielectric layer. A hard mask is formed with nano-size openings overlying the conductive film. The conductive film is plasma etched via nano-size openings in the hard mask, stopping at the dielectric layer. After removing the hard mask, a conductive film is left with nano-size openings to the dielectric layer. Metal is deposited in the nano-size openings, creating a pattern of metallic nanoparticles overlying the dielectric layer. Then, the conductive film is removed. The hard mask may be formed by conformally depositing an Al film overlying the conductive film and anodizing the Al film, creating a hard mask of porous anodized Al oxide (AAO) film. The porous AAO film may form a short-range hexagonal, and long-range random order hole patterns.

主权项

1. A method for forming a reflective plasmonic display, the method comprising:
providing a substrate; depositing a bottom dielectric layer; depositing a conductive film overlying the bottom dielectric layer; forming a hard mask with nano-size openings overlying the conductive film; plasma etching the conductive film via nano-size openings in the hard mask, stopping at the bottom dielectric layer; removing the hard mask, leaving a conductive film with nano-size openings to the bottom dielectric layer; depositing metal in the nano-size openings, creating a pattern of metallic nanoparticles overlying the bottom dielectric layer; and, removing the conductive film.