| 发明名称 | System and method for non-contact microscopy for three-dimensional pre-characterization of a sample for fast and non-destructive on sample navigation during nanoprobing | ||
| 摘要 | A system for performing sample probing. The system including an topography microscope configured to receive three-dimensional coordinates for a sample based on at least three fiducial marks; receive the sample mounted in a holder; and navigate to at least a location on the sample based on the at least three fiducial marks and the three-dimensional coordinates. | ||
| 申请公布号 | US8895923(B2) | 申请公布日期 | 2014.11.25 |
| 申请号 | US201314083438 | 申请日期 | 2013.11.18 |
| 申请人 | DCG Systems, Inc. | 发明人 | Ukraintsev Vladimir A.;Stallcup Richard;Pryadkin Sergiy;Berkmyre Mike;Sanders John |
| 分类号 | H01J37/26;H01J37/28;G02B27/32;G02B21/00;G01Q60/00;G01Q10/00;G01Q60/38;G01Q60/48 | 主分类号 | H01J37/26 |
| 代理机构 | Nixon Peabody LLP | 代理人 | Nixon Peabody LLP |
| 主权项 | 1. A system for performing sample probing, comprising: a topography microscope configured to: receive three-dimensional coordinates for a sample based on at least three fiducial marks;receive said sample mounted in a holder; andnavigate to at least a location on said sample based on said at least three fiducial marks and said three-dimensional coordinates. | ||
| 地址 | Fremont CA US | ||