APPARATUS AND METHOD FOR SEPARATING PLATES

摘要

Provided are an apparatus and a method for separating a substrate. The apparatus for separating a substrate comprises an upper transfer part which fixes a first substrate in an XY coordinate composed of X and Y axes crossing in a vertical direction and transfers the first substrate in a positive X-axis direction; a lower transfer part which is installed to be apart from the bottom of the upper transfer part and fixes a second substrate to transfer the second substrate. The lower transfer part includes a first transfer section for transferring the second substrate in a positive X-axis direction and a second transfer section for simultaneously transferring the second substrate in positive X-axis and negative Y-axis directions.