| 摘要 |
<p>An apparatus for detecting a gas leakage according to the present invention includes: a collecting part to collect gas leaked due to a breakage of a pneumatic valve; an exhaust line having an end coupled to an outlet of the collecting part to exhaust discharged gas, which is discharged from the outlet of the collecting part; and a detection part coupled to the other end of the exhaust line to detect the gas included in a discharged air, which is discharged from the exhaust line, wherein the collecting part is attached to a leak hole, through which the gas leaks due to the breakage of the pneumatic valve, to form a collecting hole to collect the gas. According to an effect of the present invention, when installing the collecting part on the pneumatic valve installed in a semiconductor line, the collecting part is fitted to a top or a side surface of the pneumatic valve by using a blade part in such a manner that the collecting hole of the collecting part and the leak hole of the pneumatic valve are matched with each other, so that the semiconductor line is not stopped thus not only is the semiconductor line operation not influenced, but also reduction in a production amount due to the stoppage of the semiconductor line and cost loss due to the stoppage are not created.</p> |
