发明名称 |
Interferometric method and digital holographic microscope |
摘要 |
An interferometric method for detecting information about a sample includes emitting a laser beam; splitting the laser beam into a reference beam and an object beam; transmitting the object beam through the sample in an incident angle; combining the reference beam with the object beam passed through the sample to form an interference pattern; detecting the interference pattern, and non-linearly scanning the object beam in order to detect a plurality of interference patterns. |
申请公布号 |
US8896840(B2) |
申请公布日期 |
2014.11.25 |
申请号 |
US201213455931 |
申请日期 |
2012.04.25 |
申请人 |
Canon Kabushiki Kaisha |
发明人 |
Matsubara Isao;Yu Chung-Chieh;Unno Yasuyuki;Dallas William |
分类号 |
G01B9/021 |
主分类号 |
G01B9/021 |
代理机构 |
Canon U.S.A., Inc. IP Division |
代理人 |
Canon U.S.A., Inc. IP Division |
主权项 |
1. An interferometric method for detecting information about a sample comprising;
emitting a laser beam; splitting the laser beam into a reference beam and an object beam; transmitting the object beam through the sample at an incident angle; combining the reference beam with the object beam passed through the sample to form an interference pattern; detecting the interference pattern, and non-linearly scanning the object beam in order to detect a plurality of interference patterns and to reconstruct a three-dimensional image of the sample. |
地址 |
Tokyo JP |