发明名称 DICING METHOD
摘要 <p>According to an aspect of the present invention, there is provided a dicing apparatus in which: in a case where a control device detects, during an image pickup of a workpiece set onto a second worktable by a first image pickup device and a second image pickup device, that an image of a workpiece set onto a first worktable also needs to be picked up by the first image pickup device and the second image pickup device, the control device determines a priority between an operation performed on the first worktable and an operation performed on the second worktable; and when it is determined that the operation performed on the first worktable has a higher priority, the image pickup of the workpiece set onto the second worktable is interrupted, and the first image pickup device and the second image pickup device are moved to perform an image pickup of the workpiece on the first worktable.</p>
申请公布号 KR101464804(B1) 申请公布日期 2014.11.24
申请号 KR20107011133 申请日期 2008.11.13
申请人 发明人
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
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