GAS SPRAYER AND THIN FILM DEPOSITING APPARATUS HAVING THE SAME

摘要

Disclosed are a gas injector capable of reducing the process time and forming a uniform thin film, and a thin film depositing apparatus having the same The gas injector comprises an upper plate and a lower plate. The upper plate includes multiple first gas inlets. The lower plate, which is combined with the upper plate and fors a diffusion space therein, and includes multiple first gas injection holes for spraying the gas which exists in the diffusion space by being injected through the multiple first gas inlets. Moreover, the first gas inlets can be arranged symmetrically with each other.