| 摘要 |
An inertial sensor includes an oscillator that is supported by an elastic supporting member such that the oscillator is floating relative to a base and the oscillator is displaceable along a single axis, and a displacement detection unit detecting a displacement of the oscillator. The oscillation of the oscillator is a simple harmonic motion along a Z axis. An X axis, a Y axis, and the Z axis, serving as reference axes of an oscillation coordinate system for the oscillator, are shifted to provide x, y, and z axes, serving as new reference axes. Position coordinates of the oscillator of the x, y, and z axes are determined in at least two points during one period of the oscillator. A difference vector (&Dgr;x, &Dgr;y, &Dgr;z) is calculated on the basis of the determined position coordinates. An angular velocity or an acceleration is obtained using the difference vector. |
