| 摘要 |
<p>The present invention relates to a method for recovering nitrogen trifuluoride (NF_3) from exhaust gas under NF_3 manufacturing processing, the method comprising the steps of: 1) obtaining exhaust gas which consists of non-condensation gas whose main gases are condensed NF_3 and nitride; 2) dividing the exhaust gas into non-condensation gas whose main gas is nitride by connecting the exhaust gas to solid absorbent between -195°C-0°C and for NF_3 being absorbed and attached; 3) recovering the NF_3 absorbed and attached on the solid absorbent being separated therefrom. The method for recovering NF_3 of the present invention is economically more used industrially compared with the existing method for separating and removing high-priced NF_3.</p> |
