摘要 |
<p>The present invention provides technology capable of properly detecting a stop position of a substrate, for example, when the substrate is stopped without a stopper in regard to a returning part. A position detecting device relating to the technology includes a photographing part, the returning part, and a control part. The returning part returns the substrate in a return direction and stops the returned substrate. The control part photographs an edge in the return direction of the stopped substrate by the photographing part and detects the stop position of the substrate based on a position of the edge of the substrate in the photographed image.</p> |