MANUFACTURING METHOD OF VO_2 COATED SUBSTRATE

摘要

The present invention relates to a manufacturing method of a vanadium dioxide coated substrate, and more specifically, to a manufacturing method of a vanadium dioxide coated substrate, in which the sunlight permeability is controlled according to the temperature. The present invention provides a manufacturing method of a vanadium dioxide coated substrate, which is characterized by comprising a vanadium metal or vanadium oxide thin film forming step of coating a vanadium metal or a vanadium oxide on a substrate; and a rapid thermal annealing step of changing the phase of the vanadium metal or the vanadium oxide to vanadium dioxide by the rapid thermal annealing (RTA).