发明名称 ALKALINE PLATING BATH FOR ELECTROLESS DEPOSITION OF COBALT ALLOYS
摘要 <p>The present invention relates to aqueous, alkaline plating bath compositions for electroless deposition of ternary and quaternary cobalt alloys Co-M-P, Co-M-B and Co-M-B-P, wherein M is selected from the group consisting of Mn, Zr, Re, Mo, Ta and W which comprise a propargyl derivative as the stabilising agent. The cobalt alloy layers derived there from are useful as barrier layers and cap layers in electronic devices such as semiconducting devices, printed circuit boards, and IC substrates.</p>
申请公布号 KR20140134325(A) 申请公布日期 2014.11.21
申请号 KR20147028526 申请日期 2013.01.09
申请人 ATOTECH DEUTSCHLAND GMBH 发明人 BERA HOLGER;BRUNNER HEIKO
分类号 C23C18/50;H01L21/288 主分类号 C23C18/50
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