发明名称 PROCESSING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a processing method capable of shortening the time required to measure an index distance.SOLUTION: A processing method comprises the steps of: positioning imaging means at a workpiece (2); forming a picked-up image (10) including a first chip region (8a) and a first processing schedule line (4) and a second processing schedule line (6) surrounding the first chip region by imaging the workpiece by the imaging means (imaging step); detecting a coordinate value of a first apex (P1) of the first chip region and a coordinate value of a second apex (P2) of a second chip region (8b) adjacent to the first chip region on a diagonal line of the first apex (coordinate value detection step); calculating an index distance (I1) in a first direction (D1) and an index distance (I2) in a second direction (D2) on the basis of the coordinate values (index distance calculation step); specifying a processing start position (processing start position specifying step); and processing the workpiece using the index distances (processing step).
申请公布号 JP2014220385(A) 申请公布日期 2014.11.20
申请号 JP20130098700 申请日期 2013.05.08
申请人 DISCO ABRASIVE SYST LTD 发明人 NORI YUJI
分类号 H01L21/301 主分类号 H01L21/301
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