发明名称 COMPUTATION APPARATUS, PROGRAM, AND IMAGE PICKUP SYSTEM
摘要 A computation apparatus that calculates subject information by using subject data, includes a calculation unit that calculates spatial distributions of a first-order phase value and a first-order measurement target value by using the subject data, a calculation unit that calculates an error correction function including the first-order phase value as a variable by using information of the spatial distribution of the first-order measurement target value and the spatial distribution of the first-order phase value, and a calculation unit that calculates information of a spatial distribution of a second-order measurement target value corresponding to a spatial distribution obtained by correcting the spatial distribution of the first-order measurement target value by using the error correction function, the information of the spatial distribution of the first-order phase value, and the information of the spatial distribution of the first-order measurement target value.
申请公布号 US2014341334(A1) 申请公布日期 2014.11.20
申请号 US201414276901 申请日期 2014.05.13
申请人 CANON KABUSHIKI KAISHA 发明人 Handa Soichiro
分类号 G01T1/17;G01N23/20 主分类号 G01T1/17
代理机构 代理人
主权项 1. A computation apparatus that calculates information of a subject by using subject data, wherein the subject data is information of a periodic pattern formed by light that has been modulated by the subject, the computation apparatus comprising: a calculation unit configured to calculate a spatial distribution of a first-order phase value and a spatial distribution of a first-order measurement target value by using the subject data; a calculation unit configured to calculate an error correction function including the first-order phase value as a variable by using information of the spatial distribution of the first-order measurement target value and the spatial distribution of the first-order phase value; and a calculation unit configured to calculate information of a spatial distribution of a second-order measurement target value corresponding to a spatial distribution obtained by correcting the spatial distribution of the first-order measurement target value by using the error correction function, the information of the spatial distribution of the first-order phase value, and the information of the spatial distribution of the first-order measurement target value, wherein the spatial distribution of the first-order measurement target value is at least one of a distribution of an average detection value and a visibility distribution of the subject data.
地址 Tokyo JP