发明名称 |
COMPUTATION APPARATUS, PROGRAM, AND IMAGE PICKUP SYSTEM |
摘要 |
A computation apparatus that calculates subject information by using subject data, includes a calculation unit that calculates spatial distributions of a first-order phase value and a first-order measurement target value by using the subject data, a calculation unit that calculates an error correction function including the first-order phase value as a variable by using information of the spatial distribution of the first-order measurement target value and the spatial distribution of the first-order phase value, and a calculation unit that calculates information of a spatial distribution of a second-order measurement target value corresponding to a spatial distribution obtained by correcting the spatial distribution of the first-order measurement target value by using the error correction function, the information of the spatial distribution of the first-order phase value, and the information of the spatial distribution of the first-order measurement target value. |
申请公布号 |
US2014341334(A1) |
申请公布日期 |
2014.11.20 |
申请号 |
US201414276901 |
申请日期 |
2014.05.13 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Handa Soichiro |
分类号 |
G01T1/17;G01N23/20 |
主分类号 |
G01T1/17 |
代理机构 |
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代理人 |
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主权项 |
1. A computation apparatus that calculates information of a subject by using subject data,
wherein the subject data is information of a periodic pattern formed by light that has been modulated by the subject, the computation apparatus comprising: a calculation unit configured to calculate a spatial distribution of a first-order phase value and a spatial distribution of a first-order measurement target value by using the subject data; a calculation unit configured to calculate an error correction function including the first-order phase value as a variable by using information of the spatial distribution of the first-order measurement target value and the spatial distribution of the first-order phase value; and a calculation unit configured to calculate information of a spatial distribution of a second-order measurement target value corresponding to a spatial distribution obtained by correcting the spatial distribution of the first-order measurement target value by using the error correction function, the information of the spatial distribution of the first-order phase value, and the information of the spatial distribution of the first-order measurement target value, wherein the spatial distribution of the first-order measurement target value is at least one of a distribution of an average detection value and a visibility distribution of the subject data. |
地址 |
Tokyo JP |