| 发明名称 |
LEAK TEST METHOD AND LEAK TEST APPARATUS |
| 摘要 |
A leak test method includes: reducing first pressure in an inspection space in a work and second pressure in a space in a master chamber; humidifying the inspection space in the work; and detecting a change in differential pressure between the inspection space in the work and the space in the master chamber, while the inspection space in the work is in a water-vapor saturated state. Also, in this leak test method, a leak in the inspection space in the work is detected from the change in the differential pressure. |
| 申请公布号 |
US2014338427(A1) |
申请公布日期 |
2014.11.20 |
| 申请号 |
US201214353406 |
申请日期 |
2012.10.22 |
| 申请人 |
Yamaguchi Tetsuya |
发明人 |
Yamaguchi Tetsuya |
| 分类号 |
G01M3/02;G01L19/00 |
主分类号 |
G01M3/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A leak test method comprising:
reducing first pressure in an inspection space in a work and second pressure in a space in a master chamber; humidifying the inspection space in the work; and detecting a change in differential pressure between the inspection space in the work and the space in the master chamber, while the inspection space in the work is in a water-vapor saturated state, wherein a leak in the inspection space in the work is detected from the change in the differential pressure. |
| 地址 |
Nagoya-shi JP |
