INTERNAL DEFECT INSPECTION DEVICE AND INTERNAL DEFECT INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an inspection device and inspection method capable of easily and highly accurately detecting a laminar defect inside a measurement object in a short time.SOLUTION: The inspection device for detecting a laminar defect 11 inside a measurement object 10 includes: a transmission antenna 1 that outputs a microwave 8 to be applied to the measurement object 10; and a reception antenna 2 that is spatially separated from the transmission antenna 1 and receives reflected wave from the measurement object 10. A polarization direction 8p of the microwave 8 is set vertical to a horizontal surface. In the reception antenna 2, a polarization direction with maximum sensitivity is so set that signal intensity by the reflected wave from the measurement object 10 to be received is minimum, when there is no laminar defect inside the measurement object 10. A circuit unit 3 generates a wave source of the microwave 8 and generates a detection signal from the reflected wave.