| 摘要 |
PROBLEM TO BE SOLVED: To perform a reliable inspection for solder voids and accurately determine the quality of a semiconductor device.SOLUTION: A semiconductor inspection device 1 includes: current sources 4 and 5 having one end electrically connected to a connection terminal 2 and the other end electrically connected to a connection terminal 3; a voltage detection unit 6 that detects voltage between the connection terminals 2 and 3; a forced discharge unit 7 that is constituted so as to allow charges, which are accumulated in an electrostatic capacitor of a semiconductor element 31,to be forcefully discharged; and a control unit 8 that controls the current sources 4 and 5, and the forced discharge unit 7. In testing a semiconductor device 30, the control unit 8 controls the forced discharge unit 7, after turning off a heating current of the current source 5, so as to discharge the charges accumulated in the electrostatic capacitor over a predetermined discharge time; acquires a difference between a voltage Vm, which is detected by the voltage detection unit 6 before the heating current is caused to flow, and a voltage Vm, which is detected by the voltage detection unit 6 after a charge time for charging the electrostatic capacitor by the current source 4 following the predetermined discharge time has passed; and determines the quality of the semiconductor device 30 on the basis of the difference. |
