| 发明名称 |
SENSOR ELEMENT, ELECTRONIC APPARATUS AND MOVING OBJECT |
| 摘要 |
A sensor element includes: a detection electrode section; a movable body that is provided to face the detection electrode section; and a protruding section that is provided in a region where the detection electrode section is provided in a plan view of the detection electrode section seen in a vertical direction and protrudes toward the movable body. At least a part of a surface of the protruding section is made of an insulating material. |
| 申请公布号 |
US2014338451(A1) |
申请公布日期 |
2014.11.20 |
| 申请号 |
US201414267331 |
申请日期 |
2014.05.01 |
| 申请人 |
Seiko Epson Corporation |
发明人 |
TAKAGI Shigekazu |
| 分类号 |
G01P15/125 |
主分类号 |
G01P15/125 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A sensor element comprising:
a detection electrode section; a movable body that is provided to face the detection electrode section; and a protruding section that is provided in a region where the detection electrode section is provided in a plan view of the detection electrode section seen in a vertical direction, and protrudes toward the movable body, wherein at least a part of a surface of the protruding section includes an insulating material. |
| 地址 |
Tokyo JP |
