发明名称 POLISHING COMPOSITION
摘要 The purpose of the present invention is to provide a means which is capable of improving the polishing rate and the polishing selectivity of a phase change compound. The present invention is a polishing composition which contains: an organic compound having three or more hydroxy groups; a brittle film-forming agent and/or an agent that exerts a chelating function on at least one component of a phase change compound; and an oxidant.
申请公布号 WO2014185285(A1) 申请公布日期 2014.11.20
申请号 WO2014JP62099 申请日期 2014.05.01
申请人 FUJIMI INCORPORATED 发明人 YOSHIZAKI, YUKINOBU
分类号 H01L21/304;B24B37/00;C09K3/14 主分类号 H01L21/304
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