摘要 |
PROBLEM TO BE SOLVED: To improve inspection efficiency.SOLUTION: An inspection apparatus includes inspection section that performs supply processing for supplying an inspection signal to each terminal of a capacitor 200 as an inspection object and discharge processing for discharging a charge stored in the capacitor 200 by supplying the inspection signal, measures insulation resistance and capacity of the capacitor 200 based on a physical quantity between the terminals detected when performing each processing, and that inspects the quality of the capacitor 200 based on each measurement value. The inspection section measures: insulation resistance of the capacitor 200, based on a value of inter-terminal current flowing between the terminals and a value of inter-terminal voltage generated between the terminals as physical quantities detected in a state where the supply processing is performed; and capacity of the capacitor 200 based on a value of inter-terminal current and a value of inter-terminal voltage which are detected within a time Ta from the start of the supply processing to the start of measurement of the insulation resistance and within a time Tb from the start of the discharge processing to the end of the discharge processing. Thus, the inspection apparatus inspects the quality. |