| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a surface quality measuring device that deters falling of a measurement arm and prevents a stylus from colliding with a measuring object.SOLUTION: A surface quality measuring device 100 includes: a measurement arm that is supported in a manner capable of executing arc motion; a stylus that is provided at a tip end of the measurement arm 233; a displacement detector 235 that detects displacement of the measurement arm; and a voice coil motor 240 that energizes the measurement arm in an arc motion direction and imparts measuring force. A controller 300 comprises: a central control section 320 that outputs a measuring force command ordering a direction and magnitude of the measuring force; and a measuring force control section 400 that controls the direction and magnitude of the measuring force generated by the voice coil motor 240. The measuring force control section 400 monitors a displacement detection signal from the displacement detector 235, and when a displacement velocity of the measurement arm exceeds a prescribed threshold, it applies feedback so that force in a direction of raising the tip end of the measurement arm upwards occurs in the voice coil motor 240.</p> |
