| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a regeneration technique of chemical polishing liquid in which acidity in waste liquid or regeneration efficiency is taken in consideration.SOLUTION: There is provided a method for regenerating glass polishing liquid which includes: (i) a process of adding hydrogen fluoride compound to used glass polishing liquid which is used for polishing glass and thus generating precipitate in the used glass polishing liquid; and (ii) a process of removing at least a part of the precipitate from the used glass polishing liquid. The hydrogen fluoride compound has a form of bifluoride MHF(M: metal element, H: hydrogen element, F: fluorine element) consisting of a metal element, a hydrogen element and two fluorine elements. Further, in the process of (i), hydrofluoric acid is generated in the used glass polishing liquid by the addition of the hydrogen fluoride compound.</p> |
