发明名称 MACHINING HEAD FOR A LASER MACHINING DEVICE COMPRISING A PATH-LENGTH MODULATOR IN THE REFERENCE ARM; METHOD FOR LASER MACHINING OF A WORKPIECE, COMPRISING CORRESPONDING STEPS
摘要 The invention relates to a machining head for a laser machining device, which is equipped for machining a workpiece (24) using laser radiation (30). The laser machining head comprises an adjustable focusing optical unit (34), which focuses the laser radiation (30) in a focal spot (22). The distance between the focal spot (22) and a machining head can be modified by modifying the focal length of the focusing optical unit (34). A scanning apparatus (44) deflects the laser radiation (30) in different directions. An optical coherence tomography device (48) measures a distance between the treatment head and the workpiece (24). Here, measuring light (52), which was generated by a measuring light source (50) and reflected by the workpiece (24), interferes in the coherence tomography device (48) with measuring light, which travelled an optical path length in a reference arm (60). A path-length modulator (74) is disposed in the reference arm (60) and it updates the optical path length in the reference arm (60) synchronously with, and dependent on, a change in the focal length of the focusing optical unit (34).
申请公布号 CA2912135(A1) 申请公布日期 2014.11.20
申请号 CA20142912135 申请日期 2014.05.08
申请人 PRECITEC OPTRONIK GMBH 发明人 KOGEL-HOLLACHER, MARKUS;SCHONLEBER, MARTIN
分类号 B23K26/03;B23K26/04;B23K26/08;G01B9/00 主分类号 B23K26/03
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