| 摘要 |
PROBLEM TO BE SOLVED: To provide an oriented film used as a ground for obtaining easily an oriented film oriented in an azimuth different from orientation of (100) azimuth of a Pt film provided on a single crystal substrate, and to provide a production method thereof.SOLUTION: An oriented film 6 is formed on the upper surface of a Pt(100) film 4 provided on the upper surface of a single crystal substrate 2. The oriented film 6 is constituted of BaSrZrOoriented film 6a (where, p+q=1.0, 0.85≤r≤1.2) oriented in (110) azimuth and BaSrTiOoriented film 6b(where, x+y=1.0, 0.85≤w≤1.2) oriented in the (110) azimuth and formed on the upper surface of the BaSrZrOoriented film 6a. The single crystal substrate 2 is a MgO(100) substrate. |
