| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vapor deposition source assembly.SOLUTION: A vapor deposition source assembly 100 for deposition-coating vapor deposition material onto a substrate provided in a chamber includes: a chamber 110; a vapor deposition source 120 which is provided in the chamber 110 and emits the vapor deposition material; an electrode 130 which is formed so as to penetrate through the chamber and supplies electric power to heat the vapor deposition source 120; an electrical insulator 140 included between the electrode and the chamber for the electrode and the chamber not to contact each other; and an electrical insulator cap 150 which is formed on one side of the electrical insulator such that the electrical insulator cap covers electrical insulator.</p> |
