IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING ARTICLE

摘要

The present invention provides an imprint apparatus for transferring a pattern of a mold to a shot region on a substrate by curing an imprint material on the substrate while the mold and the imprint material are in contact with each other, comprising a heating unit configured to deform a shape of the shot region by heating each of a plurality of portions of the substrate, and a control unit configured to obtain a target heat quantity in each of the plurality of portions so that the shape of the shot region becomes closer to a target shape, generate a heating profile for each of the plurality of portions so that a heat quantity in the portion becomes equal to the target heat quantity, and control the heating unit to heat each of the plurality of portions according to the generated heating profile.

主权项

1. An imprint apparatus for transferring a pattern of a mold to a shot region on a substrate by curing an imprint material on the substrate while the mold and the imprint material are in contact with each other, comprising:
a heating unit configured to deform a shape of the shot region by heating each of a plurality of portions of the substrate; and a control unit configured to obtain a target heat-quantity in each of the plurality of portions so that the shape of the shot region becomes closer to a target shape, generate a heating profile for each of the plurality of portions so that a heat quantity in the portion becomes equal to the target heat quantity by combining heat quantities in the portion, and control the heating unit to heat each of the plurality of portions according to the generated heating profile.