SOURCE GAS JETTING NOZZLE FOR A VACUUM DEPOSITION APPARATUS

摘要

Disclosed is a source gas jetting nozzle which includes a connection pipe having a portion connected to a source gas supplier, a first gas pipe including a communication hole communicating with the connection pipe by connecting to one end of the connection pipe and a first jetting hole, the communication hole and the first jetting hole being formed on the outer surface of the first gas pipe, and a second gas pipe including the first gas pipe inside the second gas pipe, and including a first insertion hole for inserting a predetermined part of the connection pipe to connect the one end of the connection pipe to the communication hole of the first gas pipe, and a second jetting hole for jetting the source gas introduced from the first gas pipe.

主权项

1. A source gas jetting nozzle for a vacuum deposition apparatus, comprising:
a connection pipe having a portion connected to a source gas supplier for supplying a source gas; a first gas pipe including a communication hole connected with the connection pipe by connecting to one end of the connection pipe and a first jetting hole for jetting the source gas introduced through the connection pipe, the communication hole and the first jetting hole being formed on the outer surface of the first gas pipe; and a second gas pipe including the first gas pipe inside of the second gas pipe, a first insertion hole for inserting a predetermined part of the connection pipe to connect the one end of the connection pipe to the communication hole of the first gas pipe, and a second jetting hole for jetting the source gas introduced from the first gas pipe, wherein the first insertion hole and the second jetting hole are formed on an outer surface of the second gas pipe.