| 发明名称 |
Differential Pressure Sensor |
| 摘要 |
A differential pressure sensor comprises a cavity having a base including a base electrode and a membrane suspended above the base which includes a membrane electrode, wherein the first membrane is sealed with the cavity defined beneath the first membrane. A first pressure input port is coupled to the space above the sealed first membrane. A capacitive read out system is used to measure the capacitance between the base electrode and membrane electrode. An interconnecting channel is between the cavity and a second pressure input port, so that the sensor is responsive to the differential pressure applied to opposite sides of the membrane by the two input ports. |
| 申请公布号 |
US2014338459(A1) |
申请公布日期 |
2014.11.20 |
| 申请号 |
US201414266281 |
申请日期 |
2014.04.30 |
| 申请人 |
NXP B.V. |
发明人 |
Besling Willem Frederik Adrianus;Bominaar-Silkens Iris;Pijnenburg Remco Henricus Wilhelmus;Oldsen Marten |
| 分类号 |
G01L9/12 |
主分类号 |
G01L9/12 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A differential pressure sensor, comprising:
a cavity having a base including a base electrode and a first membrane suspended above the base which includes a membrane electrode, wherein the first membrane is sealed with the cavity defined beneath the first membrane; a first pressure input port coupled to the space above the sealed first membrane; a capacitive read out system for measuring the capacitance between the base electrode and membrane electrode; an interconnecting channel between the cavity and a second pressure input port. |
| 地址 |
Eindhoven NL |
