发明名称 DEVICE AND METHOD FOR MEASURING DISPLACEMENT
摘要 <p>PROBLEM TO BE SOLVED: To measure displacement in three dimensional directions and rotational direction of an object to be measured in a non-contact manner.SOLUTION: A method for measuring displacement comprises: mounting a biaxial reflective plate 13 and reflective plates 14 and 15 on an object 10 to be measured; dividing incident light by a light source 11 into lights in two axes directions by the biaxial reflective plate 13; reflecting the respective lights by the reflective plates 14 and 15; receiving a plurality of lights reflected through return reflective plates 16 and 17 with a camera 18; and calculating the displacement of the object 10 to be measured from the displacements of the plurality of received reflected lights. Thereby, the displacements of the object 10 to be measured in three dimensional directions including two axes divided by the biaxial reflective plate 13 and the displacement of rotation using an axis perpendicular to the two axes as the center of rotation can be detected in a non-contact manner with the camera 18.</p>
申请公布号 JP2014219328(A) 申请公布日期 2014.11.20
申请号 JP20130099716 申请日期 2013.05.09
申请人 CANON INC 发明人 KUSAKABE KAZUO;IBARAKI SHOICHI
分类号 G01B11/00;G01C3/06 主分类号 G01B11/00
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