METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor device that has excellent characteristics and to provide a manufacturing apparatus.SOLUTION: A method of manufacturing a semiconductor device includes the steps of: injecting an impurity into a silicon carbide substrate; applying an organic solution on one surface of the silicon carbide substrate; forming a carbon layer on the one surface and the other surface of the silicon carbide substrate by heating the organic solution in a non-oxidation atmosphere; and activating the impurity.