发明名称 SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a semiconductor device having a resistive element composed to include an oxide semiconductor and a transistor composed to include an oxide semiconductor on the same substrate.SOLUTION: A semiconductor device has a resistive element and a transistor which are provided on the same substrate, in which the resistive element includes at least a first oxide semiconductor layer and the transistor includes at least a second oxide semiconductor layer, and the first oxide semiconductor layer and the second oxide semiconductor layer have the same composition and a carrier density of the first oxide semiconductor layer is higher than a carrier density of the second oxide semiconductor layer. The first oxide semiconductor layer has the higher carrier density in comparison with the second oxide semiconductor layer by being subjected to a treatment by which oxygen deficiency and/or an impurity concentration increases.</p>
申请公布号 JP2014220492(A) 申请公布日期 2014.11.20
申请号 JP20140079306 申请日期 2014.04.08
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;OKAZAKI KENICHI;KATAYAMA MASAHIRO;HAMOCHI TAKASHI
分类号 H01L29/786;G02F1/1368;G09F9/30;H01L21/822;H01L21/8234;H01L27/04;H01L27/06;H01L27/08 主分类号 H01L29/786
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