发明名称 |
SEMICONDUCTOR DEVICE |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a semiconductor device having a resistive element composed to include an oxide semiconductor and a transistor composed to include an oxide semiconductor on the same substrate.SOLUTION: A semiconductor device has a resistive element and a transistor which are provided on the same substrate, in which the resistive element includes at least a first oxide semiconductor layer and the transistor includes at least a second oxide semiconductor layer, and the first oxide semiconductor layer and the second oxide semiconductor layer have the same composition and a carrier density of the first oxide semiconductor layer is higher than a carrier density of the second oxide semiconductor layer. The first oxide semiconductor layer has the higher carrier density in comparison with the second oxide semiconductor layer by being subjected to a treatment by which oxygen deficiency and/or an impurity concentration increases.</p> |
申请公布号 |
JP2014220492(A) |
申请公布日期 |
2014.11.20 |
申请号 |
JP20140079306 |
申请日期 |
2014.04.08 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
YAMAZAKI SHUNPEI;OKAZAKI KENICHI;KATAYAMA MASAHIRO;HAMOCHI TAKASHI |
分类号 |
H01L29/786;G02F1/1368;G09F9/30;H01L21/822;H01L21/8234;H01L27/04;H01L27/06;H01L27/08 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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