发明名称 ENCLOSED X-RAY IMAGING SYSTEM
摘要 According to the present disclosure, there is provided an x-ray imaging system, comprising: an x-ray source; an x-ray detector; a sample mount for mounting a sample in a beam path between the x-ray source and the x-ray detector; an enclosure enclosing at least the sample mount in an interior of the enclosure; and a climate control system for regulating the climate inside the enclosure, wherein: the enclosure has an aperture for enabling access to at least the sample mount from outside the enclosure; the enclosure is provided with a door operable between an open position in which the aperture is open and a closed position in which the aperture is closed by the door; and the climate control system is operable to provide a positive pressure differential between the interior of the enclosure and an exterior of the enclosure such that the interior of the enclosure is maintained at a higher pressure than the exterior of the enclosure when the door is open. Such a system is able to better regulate the temperature inside the enclosure even when the door is opened.
申请公布号 WO2014184127(A1) 申请公布日期 2014.11.20
申请号 WO2014EP59619 申请日期 2014.05.12
申请人 NIKON METROLOGY NV 发明人 SUZUKI, KAZUAKI
分类号 G01N23/04 主分类号 G01N23/04
代理机构 代理人
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