PROCESSED OBJECT LOADING TRAY

摘要

PROBLEM TO BE SOLVED: To allow efficient heat exchange by a heat exchange gas even when a shape of a processed object is changed, and to perform efficient operation without stopping a processing line.SOLUTION: The processed object loading tray for mounting a processed object W and making a heat exchange gas flow pass without substantial resistance is provided. A constant gas passing gap S1 is formed along an inner periphery of the mounted processed object W between the inner periphery and the processed object W, and a shield part 2 for occluding a particular area of the tray 1 is provided.