LASER OSCILLATOR AND POWER SUPPLY DEVICE FOR LASER OSCILLATOR

摘要

A power supply device for a laser oscillator, provided with: a high-frequency power generator for generating the electrical power/frequency required for laser oscillation; bus bars (5A, 5B), which are connected between the high-frequency power generator and a resonator, the electrical power/frequency being applied to the bus bars (5A, 5B); a cooling fan (6) for cooling the bus bars (5A, 5B); a detection conductor (7) disposed so as to be in non-contact with, and electrically disconnected from, the bus bars (5A, 5B), caused to heat by induction heating due to an inductive electromagnetic field generated by the electrical power/frequency applied to the bus bars (5A, 5B), and cooled by the cooling fan (6); and a temperature sensor (8) for sensing the temperature of the detection conductor (7).