发明名称 TRANSMISSION ELECTRON MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide a transmission electron microscope, capable of making both observation in which a sample is placed in a magnetic field of an objective lens whose spherical aberration is corrected and Lorentz observation in which a sample is placed outside of the magnetic field of the objective lens whose spherical aberration is corrected available, and capable of enhancing spatial resolution of Lorentz observation.SOLUTION: In the transmission electron microscope equipped with a spherical aberration corrector, a first sample holder 106b is disposed at an upper stream side of a first objective lens 107, a deflector 105 is disposed at an upper stream side of a second objective lens 109, and a second sample holder 108b is disposed inside of the second objective lens.
申请公布号 JP2014220105(A) 申请公布日期 2014.11.20
申请号 JP20130098298 申请日期 2013.05.08
申请人 HITACHI LTD 发明人 TAKAHASHI YOSHIO;KATSUTA TEIJI;KAWASAKI TAKESHI;FURUTSU TADAO
分类号 H01J37/26;H01J37/153 主分类号 H01J37/26
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