SENSOR CHIP HAVING A MICRO INDUCTOR STRUCTURE

摘要

A sensor chip has a supporting structure layer and a micro-inductor layer formed on the supporting structure layer and having an inductance. The micro-inductor layer comprises an insulating layer, at least one magnetic layer, and a micro-coil layer. When an external physical quantity is applied on sensor chip, the micro-inductor layer can deform correspondingly to generate a variation of the inductance. The variation of the inductance can be measured by an inductance measurement circuit. The inductance measurement circuit can be an external circuit or be integrated into the sensor chip.

主权项

1. A sensor chip, comprising:
a supporting structure layer; and a micro-inductor layer formed on the supporting structure layer and having an inductance, the micro-inductor layer comprising:
an insulating layer;at least one magnetic layer disposed at a side of the insulating layer; anda micro-coil layer disposed inside the insulating layer and surrounded by the insulating layer, wherein, the micro-coil layer has a plurality of coils as an inductor winding of the micro-inductor layer, and the micro-coil layer insulates from the magnetic layer through the insulating layer; wherein, when an external physical quantity applies on the sensor chip, the micro-inductor layer deforms correspondingly so as to change the inductance of the micro-inductor layer.