| 摘要 |
PROBLEM TO BE SOLVED: To allow characteristic adjustment of a flow rate sensor that is assembled with a target device to be easily performed.SOLUTION: A flow rate sensor 170 is provided with: a diaphragm passage 180 which generates differential pressure by being placed in a discharge passage 188; a sensor body 172 which includes a high pressure passage for introducing upstream side pressure of the diaphragm passage 180, a low pressure passage for introducing downstream side pressure of the diaphragm passage 180, and a pressure-sensitive member 16 which is placed in the way it partitions the high pressure passage and the low pressure passage, and senses differential pressure between the upstream side pressure and the downstream side pressure and is then displaced; and a sensor head 174 provided with an output terminal 54 which outputs a detection signal in accordance with the displacement of the pressure-sensitive member 16. The flow rate sensor has an outer shape in which at one end side of the sensor body 172, the diaphragm passage 180 is provided, while at the other end side of the sensor body 172, the sensor head 174 is integrally provided, and the flow rate sensor can be fitted in a fitting hole 178 of a compressor in the way it is inserted from the side of the diaphragm passage 180. |
